JPH0521866Y2 - - Google Patents

Info

Publication number
JPH0521866Y2
JPH0521866Y2 JP1987114837U JP11483787U JPH0521866Y2 JP H0521866 Y2 JPH0521866 Y2 JP H0521866Y2 JP 1987114837 U JP1987114837 U JP 1987114837U JP 11483787 U JP11483787 U JP 11483787U JP H0521866 Y2 JPH0521866 Y2 JP H0521866Y2
Authority
JP
Japan
Prior art keywords
substrate
gas
substrate holder
holder
carrier gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987114837U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6420722U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987114837U priority Critical patent/JPH0521866Y2/ja
Publication of JPS6420722U publication Critical patent/JPS6420722U/ja
Application granted granted Critical
Publication of JPH0521866Y2 publication Critical patent/JPH0521866Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1987114837U 1987-07-27 1987-07-27 Expired - Lifetime JPH0521866Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987114837U JPH0521866Y2 (en]) 1987-07-27 1987-07-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987114837U JPH0521866Y2 (en]) 1987-07-27 1987-07-27

Publications (2)

Publication Number Publication Date
JPS6420722U JPS6420722U (en]) 1989-02-01
JPH0521866Y2 true JPH0521866Y2 (en]) 1993-06-04

Family

ID=31355947

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987114837U Expired - Lifetime JPH0521866Y2 (en]) 1987-07-27 1987-07-27

Country Status (1)

Country Link
JP (1) JPH0521866Y2 (en])

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61292913A (ja) * 1985-06-21 1986-12-23 Oki Electric Ind Co Ltd 半導体物品の熱処理装置

Also Published As

Publication number Publication date
JPS6420722U (en]) 1989-02-01

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